Because the formation of a strong Al O bond during Al2O3ALD,the surface reactions are very efficient and self-limiting, so that theAl2O3ALD can be deposited at relative low temperature availablefor wool fabrics. In this study, we deposited Al2O3onto wool fabricsby ALD at 80◦C to offer a durably superhydrophobic wool fab-ric. The morphologies, chemical elements and superhydrophobicproperties of samples were characterized.