We present an experimental characterization of a new vacuum gauge based on a K type micro thermocouple
with 25.4 mm diameter. This sensor is intended for the simultaneous measurement of the
temperature and pressure in the ranges extending from 293 K to 400 K and 101 Pa to 105 Pa respectively.
The paper gives an investigation of the micro-thermocouple vacuum gauge signal for the oscillating
heating and cooling processes. The operation of the sensor is based on the analysis of the frequency of
the oscillating signal obtained from an electric Joule heating of fixed duration and a cooling of variable
duration depending on gas pressure in the vacuum chamber volume. The frequency of the signal
oscillation is a function of the gas pressure in the system. Due to its low thermal inertia (time constant of
30 ms), this gauge gives two pieces of information simultaneously: the temperature and the pressure of
the gas. Experiments are conducted with dry air.