One of the features of the Parylenes is that they can be formed in extremely thin layers. The
breakdown dc voltages of both Parylene C and N films have been determined as a function of
polymer thickness, a plot of which is shown in Figure 3. Parylene C is superior to N in this
respect for films under 5 micrometers (0.0002 in). These data show that both Parylenes have
excellent dielectric withstanding voltages even below the 1 micrometer thickness range, and the
voltage breakdown per unit thickness generally increases with decreasing thickness.