Three-dimensional integrated circuits (3D ICs) [13], [14] are
attractive options for overcoming the barriers in interconnect
scaling, thereby offering an opportunity to continue performance
improvements using CMOS technology. 3D integration
also provides new opportunities for future CMP design, with a
new dimension of design space exploration. In particular, the
heterogenous integration capability enabled by 3D integration
gives designers new perspective when designing future CMPs.