The semi-transparent sample, deposited with 15 sccm, shows a significant increase of the oxygen content along with a significant decrease of the nitrogen and its stoichiometry could correspond to an oxynitride-type structure. However, the exact determination of the crystalline structure is again very difficult due the reduced number of visible diffraction peaks. Nevertheless, and according to very few research studies the diffraction peaks located at 2θ≈21.1°, 2θ≈30° and 2θ≈32.9° could correspond to a bcc γ-Zr2ON2- type structure (ICDD card n° 48-1635) [23].