Meeting with K.Leon qui & K Tong Mgr. 1. Apcb team testing HCL3-5% to clean all line a,b 2. Satisfied the performance of cleaning develop chamber by using 4% HCl 3. Apcb team will add to SOP.to using HCL 3-5% to clean develop chamber every 6 month.
Meeting with K.Leon qui & K Tong Mgr.1. Apcb team testing HCL3-5% to clean all line a,b2. Satisfied the performance of cleaning develop chamber by using 4% HCl3. Apcb team will add to SOP.to using HCL 3-5% to clean develop chamber every 6 month.