Internal vibrations at the slabs of the precision instruments may be a significant problem for the proper operation of the equipment [24], [25] and [26]. Therefore, foundations of the buildings and precision equipment foundation should be separated from each other to prevent the internal structure-borne vibrations [17] and [27]. This precaution also eliminates the footstep-induced vibrations. For this purpose, in the foundation design of vibration isolation pedestal of the precision instrument is placed directly on a separated floor without any contact with the operator floor.