Its high chemical inertness, extreme strength, and easy shear capability on its densely packed and atomically smooth surface are the major favorable attributes for its impressive tribological behavior. Since it is ultrathin even with multilayers, it can be applied to nano-scale or micro-scale systems such as microelectromechanical systems (MEMS) and nanoelectromechnical systems (NEMS) with oscillating, rotating, and sliding contacts to reduce stiction, friction, and wear.