Comparing with setup presented in the figure 1 there is lack
of microwave power measurement system and impedance
matching devices. Also the microwave generator is of
different structure. Because of demand not too high
microwave power to supply our novel plasma sources the
microwave generator can incorporates the magnetron
typical for microwave ovens assuring power up to 1000 W.
It should be also noted that such device does not require
the water cooling. It can also work without isolator.
All experimental tests were performed with argon and neon
at a flow rate up to 25 l/min and microwave power up to
500 W.