A JEOL 5600-2v scanning electron microscope (SEM) was utilized to
investigate the morphology of the produced thin films using an accelerating
voltage of 20 kV. The composition of thin films was also determined
by an energy-dispersive X-ray spectroscopy (EDX) system
attached to the SEM. Table 3 shows the composition of the fabricated
thin films. The table reveals a relativly high concentration of Mn
which can be assigned to its high evaporation rate