Scaling the metal lines from 25 m down to 3 m is
possible using optical lithography while maintaining the batch processing capability and in the meantime this scaling will reduce
the speed of the sensor significantly; a characteristic of the
sensor which will be explored in the future.
The breakdown voltage is another important parameter for the
humidity sensors. The maximum electrical field before breakdown
for similar polymides has been measured to be between
3.3 MV/cm and 1.6 MV/cm for relative humidities between 0%
and 100% [11]. The maximum field that the sensor can withstand
is related to the maximum applied voltage through the relationship