Capacitive micromachined ultrasonic transducers
(CMUT) is an important research direction of MEMS
Capacitive micromachined ultrasonic transducers
(CMUT) is an important research direction of MEMS
technology, its acoustic impedance is close to gas and
liquid, thus a matching layer is not needed; [4-5] It
also has good mechanical and electrical properties
and higher resonance frequencies (up to tens of MHz)
and a quality factor (up to several hundred); all of
these good properties make it possible to achieve
high sensitivity and small-scale pressure
measurements. Meanwhile, it has such advantages as:
simple structure, low cost