The pressure sensors were calibrated using a pressure gauge
calibration system (Pressure Systems, Model 9035), while their
temperature properties were tested in a furnace (Thermolyne,
47 900). An MEFPI pressure sensor static pressure response is
shown in Fig. 3. The sensor showed a linear response to static
pressure 0–200 psi at room temperature. The sensor pressure
sensitivity was about 0.316 nm/psi and the sensor system had a
resolution of about 0.1 psi (689 Pa or 5 mmHg). The sensor’s