Results
The analysis(presentedbelow)concludedthattherewas
polycrystallinesiliconformation.AnXRDscanusingtheBragg
Brentanogeometryillustratesthepolycrystallinenatureofthe
silicon film asshownin Fig. 2.
There existsoneverystrongSi[111]peakwhichcanbeseenat
28.35°, asexpected.AnadditionalSi[311]at56.24° is presentfor