The SiOx coatings with higher oxygen
contents would be expected to have a lower WVTR, however, the
WVTR was higher for the coating deposited at an O2 flow rate of
28 sccm than for the coating deposited at an O2 flow rate of 20 sccm at
a fixed HMDSO flow rate of 1.5 g/h, due to the lower coating thickness
of the former