CdTe/CdS solar cells were fab- ricated using the close spaced sublimation (CSS) process that has attractive features for large area applications such as high deposition rates and efficient material utilization. According to Powalla et al. [19], all existing thin-film PV technologies, especially the Cu(In,Ga)Se2 (CIGS)-based technology, have a high cost reduction potential at high production volumes, projecting futur- istic challenge to combine high production volumes with high throughput, sufficient yield and superior quality to achieve effi- ciencies of above 11% and a maximum of 12.7%.