The plexiglass
microcell has been fabricated by conventional mechanical
techniques, like milling, drilling and sawing, whereas the SU-
8 microcell has been prepared by semiconductor-compatible
thin-film techniques, such as spin-coating, photolithography,
etc.
The plexiglassmicrocell has been fabricated by conventional mechanicaltechniques, like milling, drilling and sawing, whereas the SU-8 microcell has been prepared by semiconductor-compatiblethin-film techniques, such as spin-coating, photolithography,etc.
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