Different thickness of TiOPc was deposited by thermal vapor evaporation
in vacuum. β-TiOPc can be obtained by deposition after evaporation.
While α-TiOPc was obtained after solvent annealing with
special solvent solution system as the crystal form controlled agent.
Chloroform was used to induce the formation of the β-TiOPc transfering
to α-TiOPc. The solvent annealing treatment involved placing the
as-deposited TiOPc film together with a vial of chloroform in a closed
container for 1 h. The film was heated to 90 °C for 30 min. Finally,
about 100 nm thickness Au was thermally evaporated on the top of
the device