Fabrication of thick film and measurement
The substrate with built-in sensitizer electrode and heater used
in this study was purchased in the market. The front side of
alumina substrate (13 mm 8 mm 0.67 mm) is the electrode
part which has three pairs of Pt at 0.5 mm interval, and the back
side is the heater part which is composed of Ni–Cr. Fig. 1 shows the
component diagram of the thick film sensor.