Fig. 2. Surface morphology of three representative samples prepared using different treatment times. (a) Reference sample: no treatment, 68 nm RMS roughness, 27% haze.(b) 20 s treatment time: 54 nm RMS roughness, 12% haze. (c) 80 s treatment time: 18 nm RMS roughness, 2% haze. All layers had a thickness of 1.6 mm and B2H6/DEZ ¼ 1.1 Á 10 À 3. The lateral size is always 2 Â 2 mm2, the scale bar is 500 nm, and the vertical axis is the same for all pictures.