A low pressure RF remote plasma, with low temperature, was used as new sterilization system. This
system was designed especially for thermo-sensitive materials. SF6 plasma has been found to totally
inactivate all investigated microorganisms within three minutes. The effect of the SF6 plasma treatment
(soft conditions) and following the aging on three polymers films has been investigated.
The evolution of surface after plasma treatment was studied by several techniques. FTIR was used to
follow the degradations and changes in the bulk polymers. The SEM images showed the etching and
grafting on the polymers surfaces. The decreasing of the wettability in the treated surfaces indicates an
increasing in surface hydrophobicity. The decreasing of C and O atoms on the surface and the developing
of non-polar sites (F functionalities) were observed by XPS analysis. The surface modifications were
found to be permanent.