The original combination of high-angle –2 (Bragg–Brentano geometry) X-ray diffraction with lowangle –2 X-ray reflectivity (XRR) techniques allows us to define the AZO target composition and inves-tigate the structural properties and surface/interface roughness of as-sputtered ZnO:Al films; besides,the growth dynamics of ZnO:Al is unambiguously determined.