In order to performthe line scans, the samples have been cut in two
halves perpendicular to the large polished surface. The resulting two cross sections have been embedded in resin and polished and used in
the embedded form for the SIMS line scans. The line scan has been always
started at the polished side. The surface concentration has been
measured in the depth profiling mode. When needed, crater depths
were measured after the SIMS experiments using a surface profiler.
Typical profiles are given exemplarily in Fig. 3.