In a previous work, the residual stresswasmeasured using the sin2ψ
method of XRD for as-grown 304 stainless steel thin films, where they
were found to exhibit low tensile stress [17]. The sin2ψ method ignores
the thickness effect on stress due to their low thickness and since the
penetration depth of X-ray is undefined [26]. In addition, the sin2ψ
methodwas used to estimate the stress of themajority α-phase. In contrary,
the curvature method can be used to determine the stress of the
mixture of α and γ phases for 304 stainless steel thin films. Herein,
the curvature method may be used to study the influence of thin film
thickness on residual stress value, because Stoney's relation takes into
account the ratio Hs/hf. In addition, the curvature method can also be
used to study annealing effect on residual stress developed in the 304
stainless steel thin films