Kreiger et al. [75] conducted an LCA study of silane recycling in a-Si PV module manufacturing. In this study, a cryogenic separa- tion and distillation-based recycling process proposed by [76] is modeled and evaluated. By reducing the loss rate of silane during the deposition process from 85% to only 17%, the recycling process results in an energy savings of 81,700 GJ and prevents 4400 t of CO2 from being released into the atmosphere per year for the single junction plant.