As a public service, listed below are some terms and definitions of common components of a cleanroom, quoted from Liberty Industries’ “Your Guide to a Clean Room Facility”. Because this periodically is updated and changes, we recommend getting the most up-to-date version from the Institute of Environmental Sciences and Technology or another credible source.
• Airborne particulate cleanliness class. The statistically allowable number of particles equal to or larger than 0.5 micrometer in size per cubic foot of air.
• Calibration. Comparison of a measurement standard of instrument of unknown accuracy with another standard or instrument of known accuracy to detect, correlate, report, or eliminate by adjustment any variation in the accuracy of the unknown standard of instrument.
• Clean zone. A defined space in which the concentration of airborne particles is controlled to specified limits.
• Clean room or cleanroom. A room which the concentration of airborne particles is controlled to specified limits.
• As-built cleanroom (facility). A cleanroom (facility) that is complete and ready for operation, with all services connected and functional, but without production equipment or personnel within the facility.
• At-rest cleanroom (facility). A cleanroom (facility) that is complete and has the production equipment installed and operating, but without personnel within the facility.
• Operational cleanroom (facility). A cleanroom (facility) in normal operation with all services functioning and with production equipment and personnel present and performing their normal work functions in the facility.
• Unidirectional airflow. (Commonly known as laminar flow). Air flowing in a single pass in a single direction through a cleanroom or clean zone with generally parallel streamlines.
• Nonunidirectional airflow. (Commonly known as turbulent flow). Airflow which does not meet the definition of unidirectional airflow by having either multiple pass circulating characteristics or a nonparallel flow direction.
• Condensation nucleus counter. An instrument for counting small airborne particles, approximately 0.01 micrometer and larger, by optically detecting droplets formed by condensation of a vapor upon the small particles.
• Optical particle counter. A light-scattering instrument with display with display and/or recording means to count and size discrete particles in air.
• Particle. A solid or liquid object generally between 0.001 and 1000 micrometers in size.
• Particle size. The apparent maximum linear dimension of the particle in the plane or observation as observed with an optical microscope, or the equivalent diameter of a particle detected by automatic instrumentation. The equivalent diameter is the diameter of a reference sphere having known properties and producing the same response in the sensing instrument as the particle being measured.
• Particle concentration. The number of individual particles per unit volume of air (particles per cubic foot or particles per liter.)
• Student’s t distribution. The distribution: t=(population mean minus sample mean)/standard error) obtained from sampling a Gaussian (“normal”) distribution. (Available in tables in statistics texts).
• Upper confidence limit (UCL). An upper limit of the estimate of the mean, calculated in such a way that in a given percentage of cases (here, 95%) the upper limit of the estimate would be more than the true mean, if the means were sampled from a Gaussian (“normal”) distribution.
Note: Much more information will be added to this page, including how to do contamination monitoring and verification, and more. Continue to check back periodically at www.rep.com for updates and added material.
As a public service, listed below are some terms and definitions of common components of a cleanroom, quoted from Liberty Industries’ “Your Guide to a Clean Room Facility”. Because this periodically is updated and changes, we recommend getting the most up-to-date version from the Institute of Environmental Sciences and Technology or another credible source.
• Airborne particulate cleanliness class. The statistically allowable number of particles equal to or larger than 0.5 micrometer in size per cubic foot of air.
• Calibration. Comparison of a measurement standard of instrument of unknown accuracy with another standard or instrument of known accuracy to detect, correlate, report, or eliminate by adjustment any variation in the accuracy of the unknown standard of instrument.
• Clean zone. A defined space in which the concentration of airborne particles is controlled to specified limits.
• Clean room or cleanroom. A room which the concentration of airborne particles is controlled to specified limits.
• As-built cleanroom (facility). A cleanroom (facility) that is complete and ready for operation, with all services connected and functional, but without production equipment or personnel within the facility.
• At-rest cleanroom (facility). A cleanroom (facility) that is complete and has the production equipment installed and operating, but without personnel within the facility.
• Operational cleanroom (facility). A cleanroom (facility) in normal operation with all services functioning and with production equipment and personnel present and performing their normal work functions in the facility.
• Unidirectional airflow. (Commonly known as laminar flow). Air flowing in a single pass in a single direction through a cleanroom or clean zone with generally parallel streamlines.
• Nonunidirectional airflow. (Commonly known as turbulent flow). Airflow which does not meet the definition of unidirectional airflow by having either multiple pass circulating characteristics or a nonparallel flow direction.
• Condensation nucleus counter. An instrument for counting small airborne particles, approximately 0.01 micrometer and larger, by optically detecting droplets formed by condensation of a vapor upon the small particles.
• Optical particle counter. A light-scattering instrument with display with display and/or recording means to count and size discrete particles in air.
• Particle. A solid or liquid object generally between 0.001 and 1000 micrometers in size.
• Particle size. The apparent maximum linear dimension of the particle in the plane or observation as observed with an optical microscope, or the equivalent diameter of a particle detected by automatic instrumentation. The equivalent diameter is the diameter of a reference sphere having known properties and producing the same response in the sensing instrument as the particle being measured.
• Particle concentration. The number of individual particles per unit volume of air (particles per cubic foot or particles per liter.)
• Student’s t distribution. The distribution: t=(population mean minus sample mean)/standard error) obtained from sampling a Gaussian (“normal”) distribution. (Available in tables in statistics texts).
• Upper confidence limit (UCL). An upper limit of the estimate of the mean, calculated in such a way that in a given percentage of cases (here, 95%) the upper limit of the estimate would be more than the true mean, if the means were sampled from a Gaussian (“normal”) distribution.
Note: Much more information will be added to this page, including how to do contamination monitoring and verification, and more. Continue to check back periodically at www.rep.com for updates and added material.
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