Abstract
This paper presents trends on CMOS high-voltage techniques for power integrated circuits (PICs). Several fully CMOS compatible drain
engineering techniques will be presented. Experimental devices were fabricated in standard CMOS processes from three different
lithography generations (2, 0.7 and 0.5 mm) without resorting to any extra processing steps. MOS devices layout specificity towards
performance improvement, namely breakdown, parasitic effects and degradation, will be emphasized.
A recently developed technique used to enlarge high-voltage devices safe-operating area and reduce leakage current will also be presented
due to the very promising experimental results.
Comparison with more sophisticated and expensive technologies still reveals CMOS as a highly accessible and versatile technology for
future PICs. q 2002 Elsevier Science Ltd. All rights reserved.