Deposition of Ag (or other noble metals) particles as the catalyst is found to be effective for texturing multicrystalline Silicon wafers in HF solution. For the texturization process hydrogen peroxide or oxygen is used as the oxidant. Using the textured wafer, the efficiency of a solar cell (4 cm2) reached as high as 16.6%, which is higher than that of the solar cell made from a wafer treated by the conventional method by 1% (absolute). The averaged efficiency was also increased by about 1% (absolute). The efficiency may be further increased by optimizing the etching conditions.