Micro-punching has become a potential micro-
manufacturing process due to the simplicity of the process,
low cost, high production capability and accuracy. But the
size of a punched micro-hole is limited due to the diffi-
culties of tool fabrication. In the paper, we propose a
design procedure according to buckling theory and a kind
of micro-die fabrication method for micro-punching pro-
cess. Micro-punch and female die with high dimensional
accuracy were fabricated by micro-EDM with block elec-
trode. Micro-punching processes of stainless steel foil were
conducted with the micro-punch and female die equipped
in the precision micro-punching tool. Micro-holes of 300,
150 and 100 lm in diameter were pierced with a good
profile and high dimensional accuracy, which indicate that
the micro-die fabricated by micro-EDM is suitable for
micro-punching processes.