The single sweep test is implemented by using the
sweep frequency test of the Polytec analyzer.
Detailed experimental procedures and methods are as
follows: Firstly, the laser point of the analyzer is
aimed at the center of the membrane to pick up the
center amplitude. Then the AC excitation voltage is
applied to both ends of the device, of which the
amplitude value is 1 V and is magnified 20 times
through the power amplifier. Besides, the device is
biased with DC voltage of 100 V. Based on the finite
element simulation on the frequency characteristics,
the sweep range is preset as 0 Hz~1 MHz and the
frequency step is 100 Hz.