tPlasma facing components for fusion applications must have to exhibit long-term stability under extremephysical conditions, and therefore any material imperfections caused by mechanical and/or thermalstresses in the shaping processes cannot be tolerated due to a high risk of possible technical failuresunder fusion conditions. To avoid such defects, the method of Electrochemical Machining (ECM) enablesa complete defect-free processing of removal of tungsten material during the desired shaping, also forhigh penetration depths. Furthermore, supported by lithographic mask pretreatment, three-dimensionaldistinct geometric structures can be positive-imaged via the directional galvanic dissolution applyingM-ECM process into the tungsten bulk material.New required applications for tungsten components, e.g. as adhesion promotors in W-surfaces toenable sure grip and bonding of thick plasma-spraying layers for blanket components, will define theway of further miniaturization of well-established millimeter dimensioned M-ECM shaping processesto dimensions of 100 m and furthermore down to 50 m. Besides current M-ECM limits the articledescribes inevitable needs of further developments for mask resists, mask materials and the resultingECM parameters, to reach the needed accuracy in tungsten microstructure. The achieved progress andobserved correlations of processing parameters will be manifested by produced demonstrators made bythe new “M”-ECM process.