Process diagram to create small pitch wires.
(A) The GaAs/AlGaAs superlattice
(B) after selectively etching the AlGaAs
(C) metal deposition while tilted at 36°
(D) contact of superlattice onto adhesive layer on silicon
(E) release of metal wires by etching GaAs oxide
(F) after optional O2 plasma to remove adhesive layer.