Because of their high resistance against ultraviolet and high energy particles, ultrathin amorphous nanolaminates
can be very attractive for aerospace application. Here we report on the optical and structural properties of ultrathin
Al2O3/ZnO nanolaminates deposited by Atomic Layer Deposition. Structural properties of nanolaminates
were studied by GIXRD and AFM. Optical characterization was performed by transmittance, spectroscopic
ellipsometry and photoluminescence (PL) spectroscopy. Regression analysis of ellipsometric spectra has
shown that absorption peak decreases and blue shifted with the decrease of bilayer thickness in the stack. On
the basis of the analysis of structural and optical properties of ultrathin nanolaminates, the amorphous nature
of them is suggested.