Current TCAD use is mostly limited to process and device
simulations; however, it may be extended for the development of compact models, suitable for circuit and system level analysis.
Compact model generally include SPICE-like
parameters obtained from the device electrical behavior.
Also, variations of SPICE-like parameters need to be carefully
estimated to achieve acceptable model predictivity,
including process yield evaluation. This paper proposes and discusses an
efficient teaching methodology for microelectronics courses
when "integrated" with an online technology CAD laboratory
[7].The purpose of this research is to examine the effects of
integrating the SPICE parameter extraction tools in technology
CAD course as a subject for the design of integrated circuits.