In order to prevent clogging and bouncing of coarse particles on the layered mesh PM0.1 inertial filter, a pre-cut inertial filter consisting of webbed SUS fibers (df = 9.8 μm) packed in a ϕ 4.75 mm circular nozzle (5.5 mm length) through a metal cartridge was used upstream from the layered mesh inertial filter.