Table 4 shows nanohardness, Young modulus, thickness and chemical composition of the coatings deposited on AISI H13 tool steel.
Reactive magnetron sputtering in the A2, A3 and A4 conditions led to the formation of TiN as shown in Table 4, where the compositions of the films range from 45 to 49 at.% Ti.While, reactive magnetron sputtering in the B2 condition led to the formation of TiC as shown in Table 4, from where it is seen that the composition is approximately 57 at.% Ti and 43 at.% C.