structure. lsense represents the length of the sensing plates,and
the distance between the sheilding electrode and the sensing
electrode is defined as dsense.The oscillation of the shutter in
the ±x direction modulates the areas of overlap between the
target surface and the sense+ and sense- plates. Nsense is the
number of sense shutters.
The dynamic currents produced through the sinusoidal
movement of the shielding electrodes are given by