This bandgap change indicates the possibility of selectively depositing an optically transparent Cu2O-rich film, an absorbing black CuO-rich film or a mixture of both phases by varying the rf power during deposition. The oxygen flow rate during deposition had a less significant effect on the optical transmittance and bandgap of the films. This dependence of the stoichiometry of the copper oxide films on the deposition conditions is explained in terms of the sticking coefficient, nucleation rates and migration of impinging copper and oxygen species on the substrate.