In the nanobiomedical area, sound ultrasonic therapy is widely used as a main source to detect abnormal tissue and tumor cells. In the conventional method, micro acoustic sensors and generator [1,2] is widely used and the protection
layer is composed mostly by woven metal wires with micro-aperture on it.
It is discovered that the method is relatively unreliable, because micro dust particle and micro liquid drop can easily contaminate the inner acoustic and sensor and generator thus cause dysfunction in the long term.
In this study, it is proposed with a novel fabricated micro/nano aperture membrane to solve the above mentioned potential problems.
In order to make sure the micro/nano membrane is biocompatible, PTFE membrane [3] is selected as the main function material for its excellent performance, e.g. high/low temperature endurance, corrosive endurance, dielectric performance, low friction coefficient, etc.