Mostly based on lithographic techniques
! Extreme UV – UV wavelengths down to 13 nm
! Electron-beam lithography – resolutions ~ 10 nm
! X-ray lithography - resolutions ~ 20 nm
! Micro-imprint lithography – uses flat mold with desired
pattern that physically deforms resist surface to create
regions that will be etched
! Nano-imprint lithography – same as micro-imprint but
adapted to nanoscale