Introduction to NEMS
Nanoelectromechanical systems (NEMS) are a class of devices integrating
electrical and mechanical functionality on the nanoscale.
NEMS typically integrate transistor-like nanoelectronics with mechanical
actuators, pumps, or motors, and may thereby form physical, biological,
and chemical sensors.
The typical device dimensions in the nanometer range, leading to low
mass, high mechanical resonance frequencies, potentially large quantum
mechanical effects such as zero point motion, and a high surface-tovolume
ratio useful for surface-based sensing mechanisms.