The Au/Fe-doped ZnO/n-InP metal/interlayer/semiconductor (MIS) Schottky structure is fabricated with
Fe-doped ZnO nanostructure (NS) as an interlayer. The field emission scanning electron microscopy and
atomic force microscopy results demonstrated that the surface morphology of the FeeZnO NS on n-InP is
fairly smooth. The x-ray diffraction results reveal that the average grain size of the FeeZnO film is
12.35 nm. The electrical properties of the Au/n-InP metal-semiconductor (MS) and Au/FeeZnO NS/n-InP
MIS Schottky structures are investigated by current-voltage and capacitance-voltage measurements at
room temperature. The Au/FeeZnO NS/n-InP MIS Schottky structure has good rectifying ratio with lowleakage
current compared to the Au/n-InP MS structure. The barrier height obtained for the MIS structure
is higher than those of MS Schottky structure because of the modification of the effective barrier height
by the FeeZnO NS interlayer. Further, the barrier height, ideality factor and series resistance are determined
for the MS and MIS Schottky structures using Norde and Cheung's functions and compared to each
other. The estimated interface state density of MIS Schottky structure is lower than that of MS Schottky
structure. Experimental results revealed that the Poole-Frenkel emission is the dominant conduction
mechanism in the lower bias region whereas Schottky emission is the dominant in the higher bias region
for both the Au/n-InP MS and Au/FeeZnO NS/n-InP MIS Schottky structures.