2.2 The fabrication of TFBAW oscillator circuit
After the TFBAW devices were fabricated, oscillator circuits consisting of the matching networks and a high-frequency amplifier were formed. The impedance mismatch between two devices will lead to the attenuation and reflection of the input signal. Hence, the function of the matching networks is to match the impedances between TFBAW devices and the high-frequency amplifier. The designed and practical oscillator circuits were illustrated in Figs. 2 and 3.