Laser direct write CVD is shown to be capable of producing
feature sizes on the scale of a few hundred nanometers. It was
found that the narrowest linewidth was produced using an fs
pulsed laser on a silicon dioxide surface, due to multiphoton
absorption in silicon dioxide and confined heating by fs
pulses. There isminimal damage to the substrate surface after
deposition, and the deposited lines have the necessary electronic
properties for successful integration into an electronic
device.