In this work, the ferromagnetic transparent conducting
ZnO:Al/Fe65Co35/ZnO:Al multilayer films were fabricated
by inserting a middle magnetic Fe65Co35 thin layer into
ZnO:Al matrix using magnetron sputtering apparatus at
the different Ts . The dependence of the microstructure and
physical performance of ZnO:Al/Fe65Co35/ZnO:Al multifunctional
films on Ts was systematically investigated.
XRD spectra showed that all samples exhibited hexagonal
wurtzite structure and c-axis preferred orientation, which
were not changed by doping Al and introducing middle
Fe65Co35 layer. Raising the Ts increased the grain size
and improved the crystallinity of the sample but partially
oxidized the Fe65Co35 layer. The larger grain size and
good crystallinity could decrease the grain boundary and
point defects, thereby reducing the resistance and increasing
the carrier mobility. However, further increasing the
Ts (Ts > 350°C) increased the resistivity due to the severe
inter-diffusion of atoms between different layers and
the oxidation of the middle FeCo alloy layer. The oxidation
of the Fe65Co35 layer also resulted in a low saturation
magnetization but a large coercivity. The optimal preparation
condition for the ZnO:Al/Fe65Co35/ZnO:Al multifunctional
films was that the Ts = 350°C and the Fe65Co35 layer
thickness was 4 nm. Under this condition, the ferromagnetic
multifunctional film exhibited a low resistivity value
of 4.5 × 10−4 cm and an average transmittance of more
than 80%.