In this study, it has been reported different surface morphologies of MeP-Si irradiated by picosecond laser beam at different
fluences and number of pulses. At low fluence regime, the formation of nanoparticles based LIPSS is observed for a high number of pulses from a continuous organization of random SiOx nanoparticle distribution. The period of these LIPSS is close to the wavelength 266 nm. In addition, the cross section SEM images have shown the surface modulation phenomenon including Nps that seem to be responsible for LIPSS formation as well as the liquid phase in the vicinity of the LIPSS area.