In this research Al2O3 thin films deposited on the ion-exchanged glass were prepared using e-beam evaporation assisted with ion source technique. The treated samples were characterized in terms of both concentration gradients and mechanical strength to define the influence of physical vapor deposition on the final performances. Moreover, Raman spectroscopy measurements were carried out from the glass slides beneath the surface in order to investigate the microstructure of the silica network of the different samples.