WHY MEMS 1. MEMS allow miniaturization of existing devices 2. MEMS offer solutions which cannot be attained by macro-machined products, e.g., capacitive pressure sensor capable of sensing pressure of the order of 1 mTorr is not possible with macromachined capacitive diaphragm. 3. Interdisciplinary nature of MEMS technology and its micromachining techniques, as well as its diversity of applications has resulted in an unprecedented range of devices and synergies across previously unrelated fields (for example biology- microelectronics, optics-microelectronics) 4. MEMS allows the complex electromechanical systems to be manufactured using batch fabrication techniques, decreasing the cost and increasing the reliability. 5. It allows integrated systems, viz., sensors, actuators, circuits, etc. in a single package and offers advantages of reliability, performance, cost, ease of use, etc. hep INwww engine ngarage com/arte