Bit Patterned Media (BPM) for magnetic recording provides a route to thermally stable data recording at >1 Tb/in2 and circumvents
many of the challenges associated with extending conventional granular media technology. Instead of recording a bit on an ensemble
of random grains, BPM is comprised of a well ordered array of lithographically patterned isolated magnetic islands, each of which stores
one bit. Fabrication of BPM is viewed as the greatest challenge for its commercialization. In this article we describe a BPM fabrication
method which combines rotary-stage e-beam lithography, directed self-assembly of block copolymers, self-aligned double patterning,
nanoimprint lithography, and ion milling to generate BPM based on CoCrPt alloy materials at densities up to 1.6 Td/in2
(teradot/inch2
).
This combination of novel fabrication technologies achieves feature sizes of