The Williamson–Hall plot [24] separates the size and strain components that defines the peak broadening of an XRD data.
This is done by plotting the peak’s full width half maximum (FWHM) cosh against the 4 sinh, where h, is the diffraction angle as shown in Fig. 9. The slope of the plotted line represents the level of microstrain present in the film whilst the line’s intercept with the FWHM cosh axis gives its grain size component [30].